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Microwave Annealing for Efficient and Stable Dopant Activation Above Solubility Limit

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Microwave Annealing for Efficient and Stable Dopant Activation Above Solubility Limit

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Jin Hong Joo

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Microwave Annealing for Efficient and Stable Dopant Activation Above Solubility Limit

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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