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Sequence-defined Polypeptoids as EUV Photoresists with Molecular Precision Achieving 14-nm Half-pitch Resolution

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Sequence-defined Polypeptoids as EUV Photoresists with Molecular Precision Achieving 14-nm Half-pitch Resolution

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Chenyun Yuan

Cameron Adams

Rika Marui

Rachel Segalman

Christopher Ober

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Sequence-defined Polypeptoids as EUV Photoresists with Molecular Precision Achieving 14-nm Half-pitch Resolution

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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