Skip to main content

Search

Lab Users

Lab Users Portal

Main navigation

Getting Started
Highlights
Education and Outreach
Media
Equipment
About Us

Attached photoacid generator in end-capped chain scissionable photoresist for EUV lithography

Highlights, News, and Events

Events, News, and Highlights

Displayed Poster Title or Company Name

Attached photoacid generator in end-capped chain scissionable photoresist for EUV lithography

People

Madan R. Biradar

Huseyin Cem Kiliclar

Christopher K. Ober

AM Poster

Image

Attached photoacid generator in end-capped chain scissionable photoresist for EUV lithography

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

If you have a disability and are having trouble accessing information on this website or need materials in an alternate format, Contact web-accessibility@cornell.edu for assistance.