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Hamatech-Steag Wafer Processors

Automated Tools for Developing Wafers

Hamatech Wafer Processor Backup: Garry Bordonaro

Description:

The CNF has two Hamatech-Steag wafer processors for developing of wafers. Spray and puddle processes are available with wafer chucks for 3 inch, 100 mm, and 150 mm wafers. Standard developers are available on each tool.

Capabilities:

  • 3
  • 4
  • 6
  • Standard water developers


Additional Resources:

Training Video


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