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JBA 1000 Photoresist UV Cure

Tool for UV Curing of photoresist

Manager: Sam Wright
Backup: Edward Camacho


The JBA 1000 is a DUV exposure system intended for curing photoresist before hardbake. The gridlamp has ~15mW/cm2 output at 250nm. This energy will cause photoresist to crosslink at the surface, thus preventing resist flow at elevated temperatures required for hardbaking.

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