Edge Bead Removal System
Manager: Edward CamachoBackup: Garry Bordonaro
This Edge Bead Removal System uses a Brewer Science Cee Flange Spinner Model 200 platform along with a Nordson 752 Series Diaphragm Dispense Valve and their patented BackPack valve actuator controlled by their ValveMate 8000 Controller. The nozzle is mounted on a 4-axis cantilevered T-Slot arm with position micrometer on the X-axis for adjusting the bead size. It utilizes Microposit EBR 10A as a solvent.
This setup can accommodate 51mm to 150mm standard size substrates, but the default is 100mm.
An EBR recipe is available and it consists of process steps.
The clean edge prevents failure and contamination in exposure, reactive ion etch and thin film deposition.
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This material is based upon work supported by the National Science Foundation under Grant No. NNCI-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
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Cornell NanoScale Science & Technology Facility (CNF)
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