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P7 Profilometer

Micro contact method for measuring surface topology on a nanometer or micron scale.

Backup: Jeremy Clark , Beth Rhoades


A profilometer is a precision metrology tool used to measure surface characteristics in the micron to nanometer scale. It is an ideal tool for measuring step heights. This is useful for measuring film thickness, etch depth, surface roughness, wear-scar measurements. Many parameters of surface roughness and waviness can be measured. The P-7 is a stylus-based surface profiler, with motorized XY stage with vacuum hold down, and a wide range of scan parameter settings.


  • 0.1 Angstrom or less vertical resolution.
  • 1024 µm maximum vertical dynamic range.
  • 300 µm maximum step up.
  • 1 µm to 150 mm scan length.
  • 2 µm/sec. to 25mm/sec. scan speed.
  • 4 different image magnifications.

Processes Available:


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