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Zyvex Nanoprobes for Ultra SEM

Electrical Testing and Nanomanipulation

Zyvex S-100 Backup: Alan R. Bleier , Amrita Banerjee


The Zyvex S-100 Nanoprobes are installed on the Zeiss Ultra-55 SEM and operate under vacuum during imaging or with the beam blanked. The S-100 consists of four individually controlled nanoprobes which can be placed with a precision of five nanometers. The probes have a minimum tip radius of fifty nanometers for precision measurements, but larger probes are available for MEMS or other applications requiring more robust tips. Combined with a Keithley 4200 semiconductor characterization system, the Zyvex S-100 provides the capability to probe truly nanoscale devices, as well as driving and characterizing MEMS structures. Additionally, each individual probe has five input/output channels, adding the necessary flexibility to characterize even more complex devices yet to be designed.


  • Number of Probes: 4
  • Number of Channels: 5 per probe
  • X,Y,Z coarse resolution: 100nm
  • X,Y,Z fine resolution: 5nm
  • X,Y,Z range of motion: 12mm
  • Maximum sample size: 12mm x 12mm x 4mm
  • Probes radius: minimum 50nm, maximum 3um


  • Electrical Testing
  • MEMS
  • Nano-manipulation


Courtesy of Multispectral Imaging Inc

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