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Click the tool name for detailed information.
AJA Sputter Deposition 
Load-lock single wafer, AJA sputter tool for deposition of thin metallic and dielectric films
CHA Evaporator 
3 Hearth Thermal Evaporator for Metal Films
CHA Mark 50 E-beam Evaporator
CVC Sputter Deposition 
Magnetron Sputter system for depositing thin metal & dielectric films
Electroplating Hoods 
Equipment for electroplating various metals
GSI Plasma Enhanced Chemical Vapor Deposition System
Oxford ALD FlexAL 
Atomic Layer Deposition
Oxford PECVD 
Oxford 100 PECVD System
Parylene Deposition 
Tool for depositing conformal parylene films (Rm 228)
PVD75 Sputter Deposition 
ITO Sputter Deposition System
SC4500 Even-Hour Evaporator 
CVC SC4500 E-gun Evaporation System for deposition of thin films
SC4500 Odd-Hour Evaporator 
CVC SC4500 Combination Thermal/ E-gun Evaporation System for deposition of thin films

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