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Click the tool name for detailed information.
PACKAGING & MISC PROCESSING
CorSolutions Microfluidic Probe Station 
Characterization tool for microfluidic devices
Critical Point Dryer - Leica 
Leica CPD300 critical point dryer
Critical Point Dryer - Tousimis 
Equipment for critical point drying of MEMS structures to avoid stiction
Dicing Saw - DISCO 
DISCO Dicing Saw
Dimatix Printer 
Tool for printing a variety of materials onto substrates (Rm 224).
Hamatech Post CMP Brushcleaner 
Wafer processor for cleaning wafers after CMP
Hot Press 
Heated press for hot embossing
Ion Implant - Eaton 
Ion Implanter
Logitech Orbis CMP 
CMP (Chemical Mechanical Polishing)
Microdrill 
Custom made drill for microfluidic through holes
MVD100 
Molecular Vapor Deposition Tool for Surface Modification
ObJet30 Pro 3D Printer 
3D printer of UV curable plastics
PDMS Casting Station 
Plasma generator,curing ovens, vacuum jar and scale
Rapid Thermal Processer - AG8108 
Rapid Thermal Processer - AG8
RTA - AG610 
Rapid Thermal Anneal - AG Associates Model 610
Suss SB8e Substrate Bonder 
Universal tool for bonding processes for micro-electro-mechanical systems
Versalaser Cutting/Engraving Tool 
CO2 laser cutter/engraver


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