Click the tool name for detailed information.
4-point Probe Station
Manual probe station - lab 228 Duffield Hall
Alpha Step 200
AlphaStep 200 Surface Profiler
CDE ResMap Resistivity 4-pt Probe
Automatic 4 point probe resitivity mapper
FilMetrics Film Measurement Systems
F40 / F50-EXR Optical Measurement Systems for transparent thin film measurement
FleXus Film Stress Measurement
Noncontact tool for measuring film stress.
Leitz Film Measurement
Leitz Film Thickness Measurement System
Metricon Model 2010/M Prism Coupler
Advanced optical waveguiding measurements
Equipment for measuring surface topology in the micron or finer scales.
Micro contact method for measuring surface topology on a nanometer or micron scale.
Schott IR Inspector
The Schott IR Inspection Tool is a general all purpose semi-automatic inspection tool for front side, buried layers, and backside inspection. The machine can handle substrates size up to 200mm in Diameter.
VCA Optima Contact Angle
Contact Angle Measurement Tool
Woollam Spectroscopic Ellipsometer
Variable Angle Ellipsometer for full optical characterization of thin films
Zygo Optical Profilometer
NewView 7300 noncontact surface height measurement system
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This material is based upon work supported by the National Science Foundation under Grant No. ECCS-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
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