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METROLOGY
4-point Probe Station 
Manual probe station - lab 228 Duffield Hall
Accurion EP3 Imaging Ellipsometer 
Imaging Ellipsometer for Optical Characterization of Thin Films
Alpha Step 200 
AlphaStep 200 Surface Profiler
Bruker (Veeco) Dektak 6M profilometer 
Tool for measuring step heights and surface roughness
CDE ResMap Resistivity 4-pt Probe 
Automatic 4 point probe resitivity mapper
FilMetrics Film Measurement Systems 
F40 / F50-EXR Optical Measurement Systems for transparent thin film measurement
FleXus Film Stress Measurement 
Noncontact tool for measuring film stress.
Leitz Film Measurement 
Leitz Film Thickness Measurement System
Malvern Nano ZS Zetasizer 
Particle analysis tool for measuring size and zeta potential in solution
Malvern NS300 NanoSight 
Tool to measure particle size distribution and concentration
Metricon Model 2010/M Prism Coupler 
Advanced optical waveguiding measurements
P10 Profilometer 
Equipment for measuring surface topology in the micron or finer scales.
P7 Profilometer 
Micro contact method for measuring surface topology on a nanometer or micron scale.
Rame-Hart-contact-angle goniometer 
Contact Angle Measurement Tool
Schott IR Inspector 
The Schott IR Inspection Tool is a general all purpose semi-automatic inspection tool for front side, buried layers, and backside inspection. The machine can handle substrates size up to 200mm in Diameter.
VCA Optima Contact Angle 
Contact Angle Measurement Tool
Woollam Spectroscopic Ellipsometer 
Variable Angle Ellipsometer for full optical characterization of thin films
Zygo Optical Profilometer 
NewView 7300 noncontact surface height measurement system


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